URL details: www.vacjour.com/CN/10.13385/j.cnki.vacuum.2018.06.12
URL title:
电弧离子镀沉积工艺参数的影响
URL paragraphs:
真空 ›› 2018 , Vol. 55 ›› Issue (6) : 49-59. doi: 10.13385/j.cnki.vacuum.2018.06.12 • • 上一篇 下一篇 赵彦辉，史文博，刘忠海，刘占奇，于宝海 ZHAO Yan-hui, SHI Wen-bo, LIU Zhong-hai, LIU Zhan-qi, YU Bao-hai
URL keywords:
电弧离子镀, 弧电流, 沉积气压, 基体偏压, 沉积温度,
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